高纯度靶材采用美国Princeton Scientific金属、非金属和化合物制成的溅射靶材,纯度在99.9%到99.9999%之间。
高纯度靶材可提供单元素纯金属和定制化合物。各种几何形状;圆形、矩形、多层瓦和阶梯式结构都可提供。
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高纯度靶材信息,请查看我们的标准和专业目标列表。我们可以根据您的具体需求生产溅射靶材.我们将帮助您选择合适的目标材料、制造工艺和粘接组件,以确保薄膜沉积工艺的成功。
我们的溅射靶材是通过熔融或粉末冶金工艺制备的。
高纯度靶材列表
材料 |
分子式 |
可提供纯度 |
铝Aluminum |
Al |
99.9% - 99.9995% |
锑化铝Aluminum antimonide |
AlSb |
99.99% |
硼化铝Aluminum boride |
AlB2 |
99.5% |
氟化铝Aluminum fluoride |
AlF3 |
99.9% - 99.99% |
氮化铝Aluminum nitride |
AlN |
99.5% |
氧化铝Aluminum oxide |
Al2O3 |
99.9% - 99.99% |
磷化铝Aluminum phosphide |
AlP |
99.95% |
氮氧化铝Aluminum oxynitride |
Al3NO3H2O |
99.50% |
锑Antimony |
Sb |
99.99% - 99.999% |
Antimony (III) sulfide |
Sb2S3 |
99.9% - 99.99% |
Antimony oxide |
Sb2O3 |
99.9% - 99.99% |
Antimony telluride |
Sb2Te3 |
99.99% - 99.999% |
Arsenic |
As |
99.9% - 99.9999% |
Arsenic oxide |
As2O3 |
99.9% |
Arsenic telluride |
As2Te3 |
99.99% |
Barium strontium titanate |
BST |
99.9% - 99.95% |
Barium sulfide |
BaS |
99.9% |
Barium zirconate |
BaZr03 |
99.5% |
Barium ferrite |
BaFe12O19 |
99.9% |
Barium fluoride |
BaF2 |
99.9% - 99.99% |
Barium oxide |
BaO |
99.5% - 99.9% |
Barium titanate |
BaTiO(3) |
99.9% - 99.99% |
|
|
|
Bismuth |
Bi |
99.9% - 99.999% |
Bismuth oxide |
Bi2O3 |
99.9% - 99.999% |
Bismuth sulfide |
Bi2S3 |
99.9% - 99.99% |
Bismuth telluride |
Bi2Te3 |
99.9% - 99.999% |
Bismuth titanate |
Bi4Ti3O12 |
99.9% - 99.99% |
|
|
|
Boron |
B |
99% - 99.999% |
Boron carbide |
B4C |
99.5% |
Boron nitride |
BN |
99.5% - 99.9% |
Boron oxide |
B2O3 |
99.9% |
|
|
|
Cadmium |
Cd |
99.9% - 99.99% |
Cadmium arsenide |
Cd3As2 |
99.9% - 99.99% |
Cadmium chloride |
CdCl2 |
99.9% |
Cadmium fluoride |
CdF2 |
99.9% - 99.99% |
Cadmium oxide |
CdO |
99.9% - 99.99% |
Cadmium selenide |
CdSe |
99.9% - 99.999% |
Cadmium stannate |
Cd2SnO4 |
99.9% - 99.99% |
Cadmium sulfide |
CdS |
99.9% - 99.999% |
Cadmium telluride |
CdTe |
99.9% - 99.999% |
|
|
|
Calcium fluoride |
CaF2 |
99.9% - 99.99% |
Calcium oxide |
CaO |
99.95% |
Calcium sulfide |
CaS |
99.9% - 99.95% |
Calcium titanate |
CaTiO3 |
99.9% |
Calcium phosphate |
Ca3(PO4)2 |
99.90% |
Calcium phosphate tribasic |
Ca10 (OH)2 (PO4)6 |
99.90% |
|
|
|
Carbon |
C |
99.9% - 99.999% |
|
|
|
Cerium |
Ce |
99.9% - 99.95% |
Cerium fluoride |
CeF3 |
99.9% - 99.95% |
Cerium oxide |
CeO2 |
99.5% - 99.95% |
|
|
|
Cesium fluoride |
CsF |
99.9% - 99.99% |
Cesium iodide |
CsI |
99.9% - 99.95% |
|
|
|
Chromium |
Cr |
99.5% - 99.999% |
Chromium oxide |
CrO3 |
99.9% |
Chromium boride |
CrB2 |
99.9% |
Chromium carbide |
Cr3C2 |
99.9% |
Chromium fluoride |
CrF3 |
99.9% |
Chromium nitride |
Cr2N |
99.9% - 99.99 |
Chromium oxide |
Cr2O3 |
99.9% - 99.95% |
Chromium silicide |
CrSi2 |
99.9% - 99.95% |
Chromium sulfide |
Cr2S3 |
99.9% |
|
|
|
Cobalt |
Co |
99.9% - 99.999% |
Cobalt ferrite |
CoFe2O4 |
99.9% |
Cobalt oxide |
CoO |
99.9% - 99.95% |
Cobalt oxide |
Co3O4 |
99.95% |
Cobalt silicide |
CoSi2 |
99.5% - 99.95% |
|
|
|
Copper |
Cu |
99.9% - 99.9999% |
Copper (II) sulfide |
CuS |
99.9% - 99.95% |
Copper oxide |
Cu2O |
99.9% - 99.99% |
Copper oxide |
CuO |
99.9% - 99.99% |
Copper phosphide |
Cu3P |
99.9% |
Copper selenide |
CuSe |
99.9% - 99.99% |
Copper sulfide |
Cu2S |
99.9% |
|
|
|
Dysprosium |
Dy |
99.9% - 99.95% |
Dysprosium fluoride |
DyF3 |
99.9% - 99.99% |
Dysprosium oxide |
Dy2O3 |
99.9% - 99.99% |
|
|
|
Erbium fluoride |
ErF3 |
99.9% - 99.95% |
Erbium oxide |
Er2O3 |
99.9% - 99.99% |
|
|
|
Europium |
Eu |
99.9% |
Europium oxide |
Eu2O3 |
99.9% - 99.99% |
|
|
|
Gadolinium |
Gd |
99.9% |
Gadolinium fluoride |
Gd2F3 |
99.9% |
Gadolinium gallium garnet |
Gd3Ga5O12 |
99.9% |
|
|
|
Gallium |
Ga |
99.99% - 99.9999% |
Gallium antimonide |
GaSb |
99.99% - 99.999% |
Gallium arsenide |
GaAs |
99.9% - 99.999% |
Gallium nitride |
GaN |
99.9% - 99.99% |
Gallium oxide |
Ga2O3 |
99.9% - 99.99% |
|
|
|
Germanium |
Ge |
99.99% - 99.999% |
Germanium nitride |
Ge3N4 |
99.9% |
Germanium oxide |
GeO2 |
99.9% - 99.99% |
Germanium selenide |
GeSe2 |
99.99% |
Germanium sulfide |
GeS |
99.99% |
Germanium telluride |
GeTe |
99.99% - 99.999% |
|
|
|
Gold |
Au |
99.9% - 99.999% |
|
|
|
Hafnium |
Hf |
99.5% |
Hafnium (IV) fluoride |
HfF4 |
99.9% |
Hafnium boride |
HfB2 |
99.5% - 99.9% |
Hafnium carbide |
HfC |
99.5% |
Hafnium oxide |
HfO2 |
99.5% - 99.95% |
|
|
|
Holmium |
Ho |
99.9% |
Holmium oxide |
Ho2O3 |
99.9% - 99.95% |
|
|
|
Indium |
In |
99.9% - 99.9999% |
Indium telluride |
In2Te3 |
99.9% - 99.999% |
Indium antimonide |
InSb |
99.9% - 99.999% |
Indium nitride |
InN |
99.9% - 99.99% |
Indium oxide |
In2O3 |
99.99% - 99.999% |
Indium phosphide |
InP |
99.99% |
Indium selenide |
In2Se3 |
99.95% - 99.999% |
Indium oxide/Tin oxide (ITO) |
In2O3/SnO2 |
99.99% - 99.999% |
|
|
|
Iridium |
Ir |
99.9% - 99.99% |
Iridium oxide |
IrO2 |
99.9% |
|
|
|
Iron |
Fe |
99.9% - 99.99% |
Iron boride |
FeB |
99.5% - 99.99% |
Iron carbide |
Fe3C |
99.9% |
Iron nickel oxide |
NiFe2O4 |
99.5% - 99.9% |
Iron nitride |
FeN4 |
99.9% |
Iron oxide |
Fe2O3 |
99.9% - 99.99% |
Iron oxide |
Fe3O4 |
99.9% - 99.99% |
Iron silicide |
FeSi2 |
99.9% - 99.99% |
Iron disulfide |
FeS2 |
99.9% - 99.995% |
|
|
|
Lanthanum |
La |
99.9% |
Lanthanum aluminate |
LaAlO3 |
99.5% |
Lanthanum boride |
LaB6 |
99.5% - 99.9% |
Lanthanum strontium manganate |
(La0.7Sr0.3)MnO3 |
99.9% |
Lanthanum titanate |
LaTiO3 |
99.9% |
|
|
|
Lead |
Pb |
99.9% - 99.99% |
Lead (II) oxide |
PbO |
99.9% - 99.99% |
Lead selenide |
PbSe |
99.9% - 99.99% |
Lead telluride |
PbTe |
99.9% - 99.999% |
Lead titanate |
PbTiO3 |
99.9% - 99.99% |
|
|
|
Lithium carbonate |
Li2CO3 |
99.9% |
Lithium cobalt oxide |
LiCoO2 |
99.9% |
Lithium fluoride |
LiF |
99.9% - 99.99% |
Lithium manganese oxide |
LiMn2O4 |
99.9% |
Lithium niobium oxide |
LiNbO3 |
99.9% |
Lithium oxide |
Li2O |
99.9% |
Lithium peroxide |
Li2O2 |
99.9% |
Lithium phosphate |
Li3PO4 |
99.9% - 99.99% |
Lithium sulfate |
Li2SO4 |
99.9% |
Lithium sulfide |
Li2S |
99.9% - 99.99% |
Lithium tetraborate |
Li3BO4 |
99.99% |
Lithium titanate |
Li2TiO3 |
99.9% |
|
|
|
Lutetium |
Lu |
99.9% - 99.95% |
Lutetium oxide |
Lu2O3 |
99.9% - 99.99% |
|
|
|
Magnesium |
Mg |
99.9% - 99.99% |
Magnesium aluminate |
MgAl2O4 |
99.9% |
Magnesium diboride |
MgB2 |
99.9% |
Magnesium fluoride |
MgF2 |
99% - 99.99% |
Magnesium oxide |
MgO |
99.9% - 99.99% |
Magnesium silicide |
Mg2Si |
99.9% |
Magnesium sulfide |
MgS |
99.9% |
|
|
|
Manganese |
Mn |
99.9% - 99.95% |
Manganese fluoride |
MnF2 |
99.9% |
Manganese Nitride |
MnN4 |
99.9% |
Manganese oxide |
MnO |
99.9% |
Manganese oxide |
MnO2 |
99.9% |
Manganese oxide |
Mn2O3 |
99.9% |
Manganese selenide |
MnSe |
99.95% |
Manganese sulfide |
MnS |
99.9% - 99.95% |
Manganese telluride |
MnTe |
99.9% - 99.95% |
|
|
|
Mercury selenide |
HgSe |
99.99% - 99.999% |
Mercury telluride |
HgTe |
99.9% - 99.99% |
|
|
|
Molybdenum |
Mo |
99.9% - 99.99% |
Molybdenum boride |
MoB |
99.5% |
Molybdenum carbide |
MO2C |
99.9% |
Molybdenum disulfide |
MoS2 |
99.5% - 99.9% |
Molybdenum oxide |
MoO3 |
99.9% |
Molybdenum oxide |
MoO2 |
99.9% |
Molybdenum selenide |
MoSe2 |
99.9% - 99.99% |
Molybdenum silicide |
MoSi2 |
99.9% - 99.99% |
Molybdenum telluride |
MoTe2 |
99.9% - 99.99% |
|
|
|
Neodymium |
Nd |
99.9% |
|
|
|
Nickel |
Ni |
99.8% - 99.999% |
Nickel boride |
Ni2B |
99.5% |
Nickel disilicide |
NiSi2 |
99.9% |
Nickel oxide |
NiO |
99% - 99.995% |
Nickel telluride |
NiTe |
99.9% |
|
|
|
Niobium |
Nb |
99.8% - 99.99% |
Niobium carbide |
NbC |
99.5% |
Niobium oxide |
Nb2O5 |
99.9% - 99.999% |
Niobium oxide |
NbO2 |
99.9% - 99.99% |
Niobium selenide |
NbSe2 |
99.9% |
|
|
|
Osmium |
Os |
99.9% - 99.95% |
|
|
|
Palladium |
Pd |
99.9% - 99.995% |
Palladium oxide |
PdO |
99.9% - 99.95% |
|
|
|
Phosphorus oxide |
P2O5 |
99.95% |
|
|
|
Platinum |
Pt |
99.9% - 99.999% |
|
|
|
Praseodymium |
Pr |
99.9% |
|
|
|
Rhenium |
Re |
99.9% - 99.99% |
|
|
|
Rhodium |
Rh |
99.9% - 99.99% |
Rhodium oxide |
Rh2O3 |
99.9% |
|
|
|
Ruthenium |
Ru |
99.9% - 99.99% |
Ruthenium oxide |
RuO2 |
99.9% |
|
|
|
Samarium |
Sm |
99.9% |
Samarium fluoride |
SmF3 |
99.9% - 99.95% |
Samarium oxide |
Sm2O3 |
99.9% - 99.99% |
|
|
|
Scandium |
Sc |
99.9% - 99.99% |
Scandium oxide |
Sc2O3 |
99.9% - 99.99% |
|
|
|
Selenium |
Se |
99.9% - 99.9999% |
Selenium oxide |
SeO2 |
99.9% |
|
|
|
Silicon |
Si |
99.9% - 99.999% |
Silicon carbide |
SiC |
99.5% - 99.9% |
Silicon dioxide |
SiO2 |
99.9% - 99.999% |
Silicon monoxide |
SiO |
99.9% - 99.99% |
Silicon nitride |
Si3N4 |
99.5% - 99.9% |
Silicon sulfide |
SiS2 |
99.5% - 99.99% |
|
|
|
Silver |
Ag |
99.9% - 99.99% |
Silver chloride |
AgCl |
99.9% |
Silver oxide |
Ag2O |
99.9% |
|
|
|
Sodium aluminum fluoride |
Na5Al3F14 |
99.5% |
Sodium carbonate |
Na2CO3 |
99.9% |
Sodium chloride |
NaCl |
99.9% |
Sodium fluoride |
NaF |
99.9% |
Sodium oxide |
Na2O2 |
99.9% |
|
|
|
Strontium carbonate |
SrCO3 |
99.9% |
Strontium fluoride |
SrF2 |
99.9% |
Strontium molybdate |
SrMoO4 |
99.9% |
Strontium oxide |
SrO |
99.9% |
Strontium ruthenate |
SrRuO3 |
99.9% |
Strontium sulfide |
SrS |
99.9% |
Strontium titanate |
SrTiO3 |
99.9% - 99.95% |
Strontium zirconate |
SrZrO3 |
99.9% |
|
|
|
Sulfur |
S |
99.9% |
|
|
|
Tantalum |
Ta |
99.9% - 99.99% |
Tantalum carbide |
TaC |
99.9% |
Tantalum nitride |
TaN |
99.5% |
Tantalum pentoxide |
Ta2O5 |
99.9% - 99.99% |
Tantalum selenide |
TaSe2 |
99.9% |
Tantalum silicide |
TaSi2 |
99.5% - 99.9% |
|
|
|
Tellurium |
Te |
99.9% - 99.999% |
Tellurium oxide |
TeO2 |
99.9% - 99.99% |
|
|
|
Terbium |
Tb |
99.9% |
Terbium fluoride |
TbF3 |
99.9% |
Terbium fluoride oxide |
TbOF |
99.9% |
Terbium oxide |
Tb4O7 |
99.9% - 99.95% |
|
|
|
Tin |
Sn |
99.9% - 99.999% |
Tin (IV) fluoride |
SnF2 |
99.9% |
Tin oxide |
SnO2 |
99.9% - 99.99% |
Tin Sulfide |
SnS2 |
99.9% |
Tin telluride |
SnTe |
99.9% - 99.99% |
|
|
|
Titanium |
Ti |
99.9% - 99.999% |
Titanium aluminide |
Ti3Al |
99.90% |
Titanium boride |
TiB2 |
99.50% |
Titanium carbide |
TiC |
99.9% |
Titanium dioxide |
TiO2 |
99.9% - 99.999% |
Titanium fluoride |
TiF3 |
99.90% |
Titanium monoxide |
TiO |
99.9% - 99.999% |
Titanium nitride |
TiN |
99.5% - 99.99% |
Titanium oxide |
Ti2O3 |
99.900% |
Titanium selenide |
TiSe2 |
99.9% - 99.99% |
Titanium silicide |
TiSi2 |
99.5% - 99.95% |
|
|
|
Tungsten |
W |
99.9% - 99.999% |
Tungsten carbide |
WC |
99.5% |
Tungsten oxide |
WO3 |
99.9% - 99.99% |
Tungsten selenide |
WSe2 |
99.9% |
Tungsten silicide |
WSi2 |
99.9% - 99.95% |
Tungsten sulfide |
WS2 |
99.9% |
Tungsten telluride |
WTe2 |
99.9% - 99.99% |
|
|
|
Vanadium |
V |
99.5% -99.9% |
Vanadium carbide |
VC |
99.5% |
Vanadium dioxide |
VO2 |
99.9% |
Vanadium nitride |
VN |
99.9% |
Vanadium oxide |
V2O3 |
99.9% |
Vanadium pentoxide |
V2O5 |
99.9% - 99.99% |
Vanadium selenide |
VSe2 |
99.9% |
Vanadium sulfide |
V2S3 |
99.9% |
|
|
|
Ytterbium |
Yb |
99.9% |
Ytterbium fluoride |
YbF3 |
99.95% |
Ytterbium oxide |
Yb2O3 |
99.9% - 99.99% |
|
|
|
Yttrium |
Y |
99.9% - 99.99% |
Yttrium aluminum oxide |
Y3Al5O12 |
99.9% |
Yttrium ferrite |
Y3Fe5O12 |
99.9% |
Yttrium fluoride |
YF3 |
99.9% - 99.99% |
Yttrium oxide |
Y2O3 |
99.9% - 99.99% |
|
|
|
Zinc |
Zn |
99.9% - 99.999% |
Zinc fluoride |
ZnF2 |
99.9% - 99.99% |
Zinc nitride |
Zn3N2 |
99.9% |
Zinc oxide |
ZnO |
99.9% - 99.999% |
Zinc phosphide |
Zn3P2 |
99.9% |
Zinc selenide |
ZnSe |
99.99% - 99.995 |
Zinc sulfide |
ZnS |
99.9% - 99.99% |
Zinc telluride |
ZnTe |
99.99% |
|
|
|
Zirconium |
Zr |
99.5% - 99.9 |
Zirconium boride |
ZrB2 |
99.5% |
Zirconium carbide |
ZrC |
99.5% |
Zirconium chloride |
ZrCl4 |
99.5% |
Zirconium fluoride |
ZrF4 |
99.9% |
Zirconium nitride |
ZrN |
99.9% |
Zirconium oxide |
ZrO2 |
99.5% - 99.9% |
Zirconium silicide |
ZrSi2 |
99.9% |
Zirconium oxide/Yttrium oxide (YSZ) |
ZrO2/Y2O3 |
99.90% |
Metals |
Aluminium |
Chromium |
Lead |
Platinum |
Tantalum |
Antimony |
Cobalt |
Lithium |
Potassium |
Tellurium |
Barium |
Gallium |
Magnesium |
Rhenium |
Tin |
Beryllium |
Germanium |
Manganese |
Rhodium |
Titanium |
Bismuth |
Gold |
Molybdenum |
Rubidium |
Tungsten |
Boron |
Hafnium |
Niobium |
Ruthenium |
Vanadium |
Cadmium |
Indium |
Nickel |
Selenium |
Zinc |
Calcium |
Iridium |
Osmium |
Silicon |
Zirkonium |
Carbon |
Iron |
Palladium |
Strontium |
|
Rare Earth |
Cerium |
Gadolinium |
Neodymium |
Terbium |
Various Rare |
Dysprosium |
Holmium |
Praseodymium |
Thulium |
Earth alloys |
Erbium |
Lutetium |
Samarium |
Ytterbium |
|
Europium |
Lanthanum |
Scandium |
Yttrium |
|
Alloys |
Al/B |
Au/Pd |
Co/Ni |
Ge/Si |
Pt/Ru |
Al/Cu |
Au/Pt |
Co/Ta/Zr |
Ge/Te |
Pt/Ag |
Al/Cu/Si |
Au/Sn |
Cr/SiO2Cermet |
In/Sn |
Sb/In |
Al/Cr |
Au/Zn |
Cu/Al |
Ir/Mn |
Sb/In/Sn |
Al/Li |
Bi/Sb |
Cu/Cr |
Ni/Cr |
Si/Al |
Al/Mg |
Bi/Sb/Se |
Cu/Ga |
Ni/Fe |
Si/Cr |
Al/Si |
Bi/Sb/Se/Te |
Cu/Ni |
Ni/Ti |
Ta/Ti |
Al/Ti |
Bi/Sb/Te |
Cu/Sn |
Ni/V |
Ti/Al |
Au/Sb |
Bi/Se |
Fe/Al/Si |
Ni/Zr |
Ti/W |
Au/Ag |
Bi/Te |
Fe/Cr |
Os/Ru |
Ti/Zr |
Au/B |
Cd/Te |
Fe/Mn |
Pb/Se |
W/Ti |
Au/Be |
So/Cr |
Fe/Ru/Ga/Si |
Pb/Te |
Zn/Al |
Au/Ge |
Co/Fe |
Fe/Si |
Pb/Se/Te |
Zr/Y |
Au/Ir |
Co/Nb/Zr |
Fe/Si/B/C |
Pd/Pt |
and others |
Oxides |
Al2O3 |
CuO |
PbZrO3 |
Supercond. |
Y2O3 |
Sb2O3 |
HfO2 unstab. |
LiNbO3 |
SrO |
ZnO |
BaTiO3 |
HfO2/CaO |
MgO |
SrTiO3 |
ZnO dop. |
Bi2O3 |
HfO2/Y2O3 |
MoO3 |
SrZrO3 |
ZrO2 unstab. |
Bi2TiO5 |
In2O3 |
Nb2O3 |
Ta2O5 |
ZrO2/CaO |
Bi4Ti3O12 |
ITO |
Nb2O5 |
ThO2 |
ZrO2/Y2O3 |
BiTiO3 |
LaAlO3 |
RE2O3 |
SnO2 |
|
CeO2 |
La2O3 |
SiO2 |
TiO2 |
|
CrO3 |
PbTiO3 |
SiO |
WO3 |
and others |
Borides |
CrB2 |
Mo2B6 |
TiB2 |
VB2 |
|
HfB2 |
NbB2 |
Wb |
ZrB2 |
|
LaB6 |
TaB2 |
W2B |
|
and others |
Carbides |
B4C |
Mo2C |
TaC |
WC6%Co |
ZrC |
Cr3C2 |
NbC |
TiC |
WC12%Co |
|
HfC |
SiC |
WC |
VC |
and others |
Fluorides |
AlF3 |
CeF3 |
LiF |
RE/NaF |
YF3 |
BaF2 |
LaF3 |
MgF2 |
Na3AlF6 |
|
CaF2 |
PbF2 |
KF |
ThF4 |
and others |
Nitrides |
AlN |
HfN |
Si3N4 |
TiN |
ZrN |
BN |
NbN |
TaN |
VN |
and others |
Silicides |
CrSi2 |
MoSi2 |
TaSi2 |
Ti5Si3 |
V3Si |
Cr3Si |
NbSi2 |
Ta5Si3 |
WSi2 |
ZrSi2 |
HfSi2 |
PtSi |
TiSi2 |
VSi2 |
and others |
Sulfides, Selenides, Tellurides |
As2S3 |
PbS |
NbSe2 |
TaTe2 |
ZnS |
CdSe |
PbTe |
Nb-S |
WSe2 |
ZnTe |
CdSe |
MoSe2 |
NbTe2 |
WsS2 |
|
CdTe |
MoS2 |
TaSe2 |
WTe2 |
|
PbSe |
MoTe2 |
TaS2 |
ZnSe |
and others |